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Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
by P. Rai-Choudhury (Editor)
Hardcover,
Society of Photo Optical
(June 1997)
List Price: $110.00
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Metrology, Inspection, and Process Control for Microlithography XVI: 4-7 March, 2002, Santa Clara, [California] USA
by Daniel J. C. Herr, International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-Optical Instrumentation Engineers
Book,
SPIE
(January 2002)
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Selected Papers on Optical Microlithography
by Harry L. Stover
Paperback,
Society of Photo Optical
(July 1992)
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List Price: $109.00
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| 4. |
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Micro-Optics and Lithography
by Maria Kufner, Stefan Kufner
Paperback,
Paul & Co Pub Consortium
(June 1997)
List Price: $49.90
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| 5. |
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Advances in Resist Technology And Processing 22
by JOHN L. STURTEVANT (Editor)
Paperback,
Society of Photo Optical
(May 2005)
List Price: $220.00
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Emerging Lithographic Technologies 9
by R. SCOTT MACKAY (Editor)
Paperback,
Society of Photo Optical
(May 2005)
List Price: $200.00
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| 7. |
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Laser Microfabrication: Thin Film Processes and Lithography
by Daniel J. Ehrlich, Jeffrey Y. Tsao (Editor), Jeffrey Y. Tsao
Hardcover,
Lightning Source Inc
(May 1989)
List Price: $194.00
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| 8. |
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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
by Unknown
Paperback,
Society of Photo Optical
(June 2000)
List Price: $65.00
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| 9. |
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Optical Microlithography V
by Harry L. Stover (Editor)
Paperback,
Society of Photo Optical
(August 1986)
List Price: $57.00
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64 To 256 Megabit Reticle Generation: Technology Requirements and Approaches
by Gregory K. Hearn, Robert J. Naber
Paperback,
Society of Photo Optical
(January 1994)
List Price: $66.00
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